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8:00

Registration

9:00

Welcome address

R. Thalmann, G. Wilkening

9:15

I. Schmidt, T. Hausotte, U. Gerhardt, E. Manske, G. Jäger (TU, Ilmenau, DE)

9:40

Nanoscale surface measurements at side walls of nano micro structures

G. Dai, H. Wolff, M. Xu, F. Pohlenz, H.-U. Danzebrink (PTB, Braunschweig, DE)

10:05

The Nanostation 300-Development of an SPM for large objects

K. Dirscherl, S.Czerkas, H.Bosse, H.-A. Fuß (PTB, Braunschweig, DE)

10:30

11:00

Conventional coordinate measurement and nanometrology: Evaluation and reduction of parasitic effects

M.Gruhlke (Helmut Schmidt University, Hamburg, DE)

11:25

Scanning performance of an ultra precision Micro-CMM using a low force 3 D touch probe

A. Küng, F. Meli, R. Thalmann (METAS, Bern, CH)

11:50

The role of tip geometry and tip-sample interactions in scanning probe microscopy

A. Yacoot (NPL, Teddington, GB), L. Koenders (PTB Braunschweig, DE)

12:15

Lunch break and Poster session

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14:00

Preliminary study on nano particle sizes under the APEC Technology Cooperative Framework

W. Fu, G.S. Peng, (CMS, ITRI, Taiwan)

14:25

Profile characterization with combined AFM and spectroscopic scatterometry

L. L. Kildemark¹, A. Kühle¹, I. Daví¹, F. Borsetto¹, J. C. Petersen¹, J. Garnæs¹, P.-E. Hansen², N. Agersnap², J. Holm³, L. H. Christensen⁴,
L. H. Thamdrup⁵ Andrej Mironov⁵ and A. Kristensen⁵

(¹Danish Fundamental Metrology, Kgs. Lyngby, DK, ²LuKa Optoscope, Rørmose Parkvej 50, Farum, DK, ³Ibsen Photonics, Farum, DK, ⁴Centre for Microtechnology and Surface Analyses, Teknologisk Institut, Taastrup, DK, ⁵MIC - Department of Micro and Nanotechnology, Technical University of Denmark (DTU), Lyngby DK)

14:50

Precise 3D-characterization of micro and nanostructured materials by means of confocal microscopy

M.Weber, (NanoFocus AG, Oberhausen, DE)

15:15

AFM investigation on possible surface damages caused by mechanical probing with small ruby spheres

F. Meli, (METAS, Bern-Wabern, CH)

15:40

16:10

Deformation measurements at the nanoscale

J. Keller^1,2), A. Gollhardt¹⁾, D. Vogel¹⁾, B. Michel¹⁾
(¹⁾Fraunhofer Institute for Reliability and Microintegration (IZM), Berlin, DE,
²⁾AMIC, Angewandte Micro-Messtechnik GmbH, Berlin, DE)

16:35

Atomic force microscopy studies of cross-sections of columnar thin films

P. Klapetek¹, I. Ohlidal² (¹Czech Metrology Institute, Brno, CR, ² Faculty of Masaryk University, Brno, CR)

17:00

New applications of the nanopositioning and nanomeasuring machine by using advanced tactile and non-tactile probes

E. Manske, R. Mastylo, T. Machleidt, K.-F. Franke, G. Jäger (TU Ilmenau, DE)

17:25

18:30

19:30

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8:30

8:35

Two-dimensional encoder with picometer resolution using lattice spacing on regular crystalline surface as standard

M. Aketagawa, H. Honda, M. Ishige, C. Patamaporn (Department of Mechanical Engineering, Nagaoka University of Technology, JP)

9:10

Calibration strategies for scanning probe metrology

K.R. Koops., M.G.A. van Veghei, G.J.W.L. Kotte (NMI, Delft, NL)

9:35

A landmark based 3D calibration strategy for SPM

M. Ritter, A. Kranzmann, (BAM, Berlin), T. Dziomba, L. Koenders (PTB, Braunschweig, DE)

10:00

11:00

Calibration of a commercial AFM: interferometric traceability for co-ordinate system

V. Korpelainen, A. Lassila (MIKES, Espoo, FI)

11:25

Detecting and addressing the surface following errors in the calibration of step heights by atomic force microscopy

J. Haycocks (NPL, Teddigton, UK)

11:50

Calibration issues in line scale based 3-D nano and micro CMMs

R. Bergmans, G. Kotte, (NMI, Delft, NL)

12:15

13:15

Higher order tip effects in traceable AFM-based linewidth measurements

NG Orji, RG Dixon ( NIST, Gaithersburg, USA)

13:40

CD Characterization of Nanostructures in SEM Metrology

C.G. Frase, E. Buhr, K. Dirscherl (PTB Braunschweig, DE)

14:05

14:15

14:30
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16:00

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