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Wilkening,
Günter / Koenders, Ludger
Nanoscale
Calibration Standards and Methods
Dimensional
and Related Measurements in the Micro- and Nanometer Range
Short description
The
quantitative determination of the properties of micro- and
nanostructures is essential in research and development. Here,
peer-reviewed papers are presented with contributions to the NanoScale
2004 seminar at the National Metrology Institute
(Physikalisch-Technische Bundesanstalt PTB), Braunschweig, Germany in
March 2004. Topics include problems of quantitative measurement as well
as methods of calibration, correction and instrumentation.
The
seminar stimulates the exchange of information between users in science
and industry and manufacturers of the relevant hard- and software.
For more informations see here >>
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